Article
Engineering of III-Nitride Semiconductors on Low Temperature Co-fired Ceramics
Author/s | Manuel Delgado, José Manuel
Jiménez Ríos, Juan Jesús Morales Sánchez, Francisco Miguel Lacroix, Bertrand Santos Izquierdo-Bueno, Antonio Jesús García Roja, Rafael Blanco Ollero, Eduardo Domínguez de la Vega, Manuel Ramírez del Solar, Milagrosa Beltrán, Ana M. Alexandrov, D. Tot, J. Dubreuil, R. Videkov, V. Andreev, S. Tzaneva, B. Bartsch, H. Breiling, J. Pezoldt, J. Fischer, M. Müller, J. |
Department | Universidad de Sevilla. Departamento de Ingeniería y Ciencia de los Materiales y del Transporte |
Publication Date | 2018 |
Deposit Date | 2018-05-14 |
Published in |
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Abstract | This work presents results in the feld of advanced substrate solutions in order to achieve high
crystalline quality group-III nitrides based heterostructures for high frequency and power devices or for
sensor applications. ... This work presents results in the feld of advanced substrate solutions in order to achieve high crystalline quality group-III nitrides based heterostructures for high frequency and power devices or for sensor applications. With that objective, Low Temperature Co-fred Ceramics has been used, as a noncrystalline substrate. Structures like these have never been developed before, and for economic reasons will represent a groundbreaking material in these felds of Electronic. In this sense, the report presents the characterization through various techniques of three series of specimens where GaN was deposited on this ceramic composite, using diferent bufer layers, and a singular metal-organic chemical vapor deposition related technique for low temperature deposition. Other single crystalline ceramic-based templates were also utilized as substrate materials, for comparison purposes. |
Citation | Manuel Delgado, J.M., Jiménez Ríos, J.J., Morales Sánchez, F.M., Lacroix, B., Santos Izquierdo-Bueno, A.J., GarcÍa Roja, R.,...,Müller, J. (2018). Engineering of III-Nitride Semiconductors on Low Temperature Co-fired Ceramics. Scientific Reports, 8, 6879-1-6879-14. |
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