Article
Room temperature synthesis of porous SiO2 thin films by plasma enhanced chemical vapor deposition
Author/s | Barranco Quero, Ángel
Cotrino Bautista, José Yubero Valencia, Francisco Espinós Manzorro, Juan Pedro Rodríguez González-Elipe, Agustín |
Department | Universidad de Sevilla. Departamento de Química Inorgánica |
Publication Date | 2004-07 |
Deposit Date | 2017-08-01 |
Published in |
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Abstract | Synthesis of porous SiO2 thin films in room temperature was carried out using plasma enhanced chemical vapor deposition (CVD) in an electron cyclotron resonance microwave reactor with a downstream configuration.The gas ... Synthesis of porous SiO2 thin films in room temperature was carried out using plasma enhanced chemical vapor deposition (CVD) in an electron cyclotron resonance microwave reactor with a downstream configuration.The gas adsorption properties and the type of porosity of the SiO2 thin films were assessed by adsorption isotherms of toluene at room temperature.The method could also permit the tailoring synthesis of thin films when both composition and porosity can be simultaneously and independently controlled. The result shows that it is possible to control the microstructure of oxide thin films deposited by room temperature plasma enhanced chemical vapor depositon (PECVD) by scarificial polymeric organic layers. |
Funding agencies | Ministerio de Ciencia y Tecnología (MCYT). España European Union (UE) |
Project ID. | MAT2001-2820
ENV4-CT97-0633 |
Citation | Barranco Quero, Á., Cotrino Bautista, J., Yubero Valencia, F., Espinós, J.P. y Rodríguez González-Elipe, A. (2004). Room temperature synthesis of porous SiO2 thin films by plasma enhanced chemical vapor deposition. Journal of Vacuum Science and Technology A, 22 (4), 1275-1284. |
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