Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films

Cotrino Bautista, José; Yanguas Gil, Alejandro; Barranco Quero, Ángel; Rodríguez González-Elipe, Agustín

doi:10.1103/PhysRevLett.96.236101

Artículo

dc.creator	Cotrino Bautista, José	es
dc.creator	Yanguas Gil, Alejandro	es
dc.creator	Barranco Quero, Ángel	es
dc.creator	Rodríguez González-Elipe, Agustín	es
dc.date.accessioned	2017-07-18T14:37:33Z
dc.date.available	2017-07-18T14:37:33Z
dc.date.issued	2006-06-26
dc.identifier.citation	Cotrino Bautista, J., Yanguas Gil, A., Barranco, A. y González Elipe, A.R. (2006). Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films. Physical Review Letters, 96 (23), 236101-1-236101-4.
dc.identifier.issn	0031-9007 (impreso)	es
dc.identifier.issn	1079-7114 (electrónico)	es
dc.identifier.uri	http://hdl.handle.net/11441/62632
dc.description.abstract	The microstructure and the scaling properties of films grown by plasma enhanced chemical vapor deposition are reproduced with a discrete model that takes into account the angular distribution function of the particles and the lateral growth of the films. Both the experimental and simulated surfaces exhibit a granular microstructure and an anomalous scaling behavior characterized by values of the growth exponent β that vary with the scale of measurement. Depending on the angular distribution function used in the model, values of β ranging from 0.86 to 0.2 are obtained.	es
dc.format	application/pdf	es
dc.language.iso	eng	es
dc.publisher	American Physical Society	es
dc.relation.ispartof	Physical Review Letters, 96 (23), 236101-1-236101-4.
dc.rights	Attribution-NonCommercial-NoDerivatives 4.0 Internacional	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0/	*
dc.title	Influence of the angular distribution function of incident particles on the microstructure and anomalous scaling behavior of thin films	es
dc.type	info:eu-repo/semantics/article	es
dcterms.identifier	https://ror.org/03yxnpp24
dc.type.version	info:eu-repo/semantics/publishedVersion	es
dc.rights.accessRights	info:eu-repo/semantics/openAccess	es
dc.contributor.affiliation	Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear	es
dc.relation.publisherversion	https://doi.org/10.1103/PhysRevLett.96.236101	es
dc.identifier.doi	10.1103/PhysRevLett.96.236101	es
idus.format.extent	4 p.	es
dc.journaltitle	Physical Review Letters	es
dc.publication.volumen	96	es
dc.publication.issue	23	es
dc.publication.initialPage	236101-1	es
dc.publication.endPage	236101-4	es

Ficheros	Tamaño	Formato	Ver	Descripción
Influence of the Angular Distr ...	682.1Kb	[PDF]	Ver/Abrir

Este registro aparece en las siguientes colecciones

Artículos (Física Atómica, Molecular y Nuclear)

Mostrar el registro sencillo del ítem

Excepto si se señala otra cosa, la licencia del ítem se describe como: Attribution-NonCommercial-NoDerivatives 4.0 Internacional