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Synthesis and tribological properties of WSex films prepared by magnetron sputtering

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dc.creator Domínguez Meister, Santiago es
dc.creator Justo Erbez, Ángel J. es
dc.creator Sánchez López, Juan Carlos es
dc.date.accessioned 2018-12-05T14:39:08Z
dc.date.available 2018-12-05T14:39:08Z
dc.date.issued 2013
dc.identifier.citation Domínguez Meister, S., Justo Erbez, Á.J. y Sánchez López, J.C. (2013). Synthesis and tribological properties of WSex films prepared by magnetron sputtering. Materials Chemistry and Physics, 142 (1), 186-194.
dc.identifier.issn 0254-0584 es
dc.identifier.uri https://hdl.handle.net/11441/80821
dc.description.abstract WSex films with variable Se/W ratio were deposited by non-reactive r.f. magnetron sputtering from WSe2 target changing the applied d.c. pulsed bias conditions and substrate temperature. The structural and chemical properties were measured by cross-sectional scanning electron microscopy (X-SEM), energy dispersive analysis (EDX), X-ray diffraction (XRD), Raman and X-ray photoelectron spectroscopy (XPS). The tribological properties were measured in ambient air (RH = 30–40%) and dry nitrogen by means of a reciprocating ball-on-disk tribometer. A clear correlation was found between the Se/W ratio and the measured friction coefficient displaying values below 0.1 (in ambient air) and 0.03 (in dry N2) for ratios Se/W ≥ 0.6 as determined by electron probe microanalysis (EPMA). The results demonstrated that notable tribological results could be obtained even in ambient air (friction ≤ 0.07 and wear rate ≈10−7 mm3 Nm−1) by controlling the film microstructure and chemical composition. By incorporating carbon, wear and chemical resistance can be gained by formation of non-stoichiometric carbides and/or alloying into the defective WSex hexagonal structure. The existence of a WSe2 rich interfacial layer (either on the ball scar or embedded in the film track) was evidenced by Raman in low friction conditions. The improvement in tribological performance is therefore obtained by means of layered WSex, the formation of gradient composition from metallic W (hard) to WSe2 (lubricant) and carbon incorporation. es
dc.description.sponsorship Ministerio de Educación y Ciencia MAT2010-21597-C02-01, MAT2011-29074-C02-01, CSD2008-00023 es
dc.description.sponsorship Junta de Andalucía P10-TEP- 67182 es
dc.format application/pdf es
dc.language.iso eng es
dc.publisher Elsevier es
dc.relation.ispartof Materials Chemistry and Physics, 142 (1), 186-194.
dc.rights Attribution-NonCommercial-NoDerivatives 4.0 Internacional *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/4.0/ *
dc.subject Chalcogenides es
dc.subject Friction es
dc.subject Sputtering es
dc.subject Raman spectroscopy and scattering es
dc.subject Microstucture es
dc.subject Wear es
dc.title Synthesis and tribological properties of WSex films prepared by magnetron sputtering es
dc.type info:eu-repo/semantics/article es
dc.type.version info:eu-repo/semantics/submittedVersion es
dc.rights.accessrights info:eu-repo/semantics/openAccess es
dc.relation.projectID MAT2010-21597-C02-01 es
dc.relation.projectID MAT2011-29074-C02-01 es
dc.relation.projectID CSD2008-00023 es
dc.relation.projectID P10-TEP- 67182 es
dc.relation.publisherversion http://dx.doi.org/10.1016/j.matchemphys.2013.07.004 es
dc.identifier.doi 10.1016/j.matchemphys.2013.07.004 es
idus.format.extent 39 p. es
dc.journaltitle Materials Chemistry and Physics es
dc.publication.volumen 142 es
dc.publication.issue 1 es
dc.publication.initialPage 186 es
dc.publication.endPage 194 es
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