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Synthesis and tribological properties of WSex films prepared by magnetron sputtering

 

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Opened Access Synthesis and tribological properties of WSex films prepared by magnetron sputtering
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Author: Domínguez Meister, Santiago
Justo Erbez, Ángel J.
Sánchez López, Juan Carlos
Date: 2013
Published in: Materials Chemistry and Physics, 142 (1), 186-194.
Document type: Article
Abstract: WSex films with variable Se/W ratio were deposited by non-reactive r.f. magnetron sputtering from WSe2 target changing the applied d.c. pulsed bias conditions and substrate temperature. The structural and chemical properties were measured by cross-s...
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Cite: Domínguez Meister, S., Justo Erbez, Á.J. y Sánchez López, J.C. (2013). Synthesis and tribological properties of WSex films prepared by magnetron sputtering. Materials Chemistry and Physics, 142 (1), 186-194.
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Format: PDF

URI: https://hdl.handle.net/11441/80821

DOI: 10.1016/j.matchemphys.2013.07.004

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