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Synthesis and tribological properties of WSex films prepared by magnetron sputtering

Opened Access Synthesis and tribological properties of WSex films prepared by magnetron sputtering

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Autor: Domínguez Meister, Santiago
Justo Erbez, Ángel J.
Sánchez López, Juan Carlos
Fecha: 2013
Publicado en: Materials Chemistry and Physics, 142 (1), 186-194.
Tipo de documento: Artículo
Resumen: WSex films with variable Se/W ratio were deposited by non-reactive r.f. magnetron sputtering from WSe2 target changing the applied d.c. pulsed bias conditions and substrate temperature. The structural and chemical properties were measured by cross-sectional scanning electron microscopy (X-SEM), energy dispersive analysis (EDX), X-ray diffraction (XRD), Raman and X-ray photoelectron spectroscopy (XPS). The tribological properties were measured in ambient air (RH = 30–40%) and dry nitrogen by means of a reciprocating ball-on-disk tribometer. A clear correlation was found between the Se/W ratio and the measured friction coefficient displaying values below 0.1 (in ambient air) and 0.03 (in dry N2) for ratios Se/W ≥ 0.6 as determined by electron probe microanalysis (EPMA). The results demonstrated that notable tribological results could be obtained even in ambient air (friction ≤ 0.07 and wear rate ≈10−7 mm3 Nm−1) by controlling the film microstructure and chemical composition. By incorpor...
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Cita: Domínguez Meister, S., Justo Erbez, Á.J. y Sánchez López, J.C. (2013). Synthesis and tribological properties of WSex films prepared by magnetron sputtering. Materials Chemistry and Physics, 142 (1), 186-194.
Tamaño: 1.077Mb
Formato: PDF

URI: https://hdl.handle.net/11441/80821

DOI: 10.1016/j.matchemphys.2013.07.004

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