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Characterization and modeling of piezoelectric integrated micro speakers for audio acoustic actuation

 

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Opened Access Characterization and modeling of piezoelectric integrated micro speakers for audio acoustic actuation
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Author: Mendoza López, Jorge
Sánchez Solano, Santiago
Huertas Díaz, José Luis
Date: 2011
Published in: World Academy of Science, Engineering and Technology, 58, 145-151.
Document type: Article
Abstract: A study of circular piezoelectric micro speakers is presented for applications in the audio frequency range, including values for impedance, admittance, noise figures, transducer gain, and acoustic frequency responses. The micro speakers were modelled based on piezoelectric micro ultrasonic transducer (pMUT) design techniques and principles. In order to reach the audio frequency range, transducer radii were increased to the order of one centimetre, whilst piezoelectric layer thicknesses ranged the order of several μm. The micro actuators presented might be used for a variety of electroacoustic applications including noise control, hearing aids, earphones, sonar, and medical diagnostic ultrasound. This work main contribution is the characterization of the design space and transducer performance as a function of transducer radius, piezoelectric layer thickness, and frequency range, looking towards an optimized fabrication process.
Cite: Mendoza López, J., Sánchez Solano, S. y Huertas Díaz, J.L. (2011). Characterization and modeling of piezoelectric integrated micro speakers for audio acoustic actuation. World Academy of Science, Engineering and Technology, 58, 145-151.
Size: 7.768Mb
Format: PDF

URI: https://hdl.handle.net/11441/77466

DOI: 10.5402/2012/635268

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