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Interpretation of electron Rutherford backscattering spectrometry for hydrogen quantification

Opened Access Interpretation of electron Rutherford backscattering spectrometry for hydrogen quantification

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Autor: Alvarez Molina, Rafael
Yubero Valencia, Francisco
Departamento: Universidad de Sevilla. Departamento de Física Aplicada I
Fecha: 2014
Publicado en: Surface and Interface Analysis, 46 (10-11), 812-816.
Tipo de documento: Artículo
Resumen: In the last few years, several papers have appeared showing the capabilities of electron Rutherford backscattering spectrometry (eRBS) to quantify the H content at surfaces. The basis of the H detection in this technique relies on the difference in recoil energy of the incident electrons depending on the mass of the atoms located at the surface that act as scatter centers. In this paper, we address the interpretation of eRBS spectra of hydrogen containing surfaces. The aim is to compare the naïve single elastic scattering approximation with a more realistic description of eRBS spectra including multiple elastic scattering using the HQ-eRBS (hydrogen quantification eRBS) software based on a Monte Carlo algorithm. It is concluded that multiple elastic scattering is a significant contribution to experimentally measured eRBS spectra of a polyethylene surface. It induces significant broadening of the distribution of the maximum elastic scattering angle along the electron trajectories contr...
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Cita: Alvarez Molina, R. y Yubero Valencia, F. (2014). Interpretation of electron Rutherford backscattering spectrometry for hydrogen quantification. Surface and Interface Analysis, 46 (10-11), 812-816.
Tamaño: 900.7Kb
Formato: PDF

URI: https://hdl.handle.net/11441/73629

DOI: 10.1002/sia.5486

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