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EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices

 

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Opened Access EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices
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Author: Castro, Celia
Andreozzi, A.
Benassayag, G.
Beltrán, A.M.
Seguini, G.
Perego, M.
Schamm-Chardon, Sylvie
Department: Universidad de Sevilla. Departamento de Ingeniería y Ciencia de los Materiales y del Transporte
Date: 2012
Document type: Presentation
Abstract: We investigated for the first time the capabilities of combining Si NCs fabrication methods like e-beam evaporation and ULE-IBS with block copolymers nanostructured masks.
Cite: Castro, C., Andreozzi, A., Benassayag, G., Beltrán, A.M., Seguini, G., Perego, M. y Schamm-Chardon, S. (2012). EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices. En 15th European Microscopy Conference Manchester (Gran Bretaña): The Royal Microscopical Society.
Size: 337.5Kb
Format: PDF

URI: https://hdl.handle.net/11441/69292

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