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Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles

 

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Opened Access Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles
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Author: Álvarez Molina, Rafael
González García, Lola
Romero Gómez, Pablo
Rico Gavira, Víctor Joaquín
Cotrino Bautista, José
Rodríguez González-Elipe, Agustín
Palmero Acebedo, Alberto
Department: Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear
Universidad de Sevilla. Departamento de Química Inorgánica
Date: 2011
Document type: Article
Abstract: The microstructural features of amorphous TiO2 thin films grown by the electron beam physical vapour deposition technique at oblique angles have been experimentally and theoretically studied. The microstructural features of the deposited films were characterized by considering both, the column tilt angle and the increase of the column thickness with height. A Monte Carlo model of the film growth has been developed that takes into account surface shadowing, short-range interaction between the deposition species and the film surface, as well as the angular broadening of the deposition flux when arriving at the substrate. The good match between simulations and experimental results indicates the importance of these factors in the growth and microstructural development of thin films deposited at oblique angles.
Size: 1.025Mb
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URI: http://hdl.handle.net/11441/68024

DOI: 10.1088/0022-3727/44/38/385302

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