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Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment

Opened Access Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment

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Autor: Barranco Quero, Ángel
Holgado Vázquez, Juan Pedro
Yubero Valencia, Francisco
Espinós Manzorro, Juan Pedro
Martín, Ana I.
Rodríguez González-Elipe, Agustín
Departamento: Universidad de Sevilla. Departamento de Química Inorgánica
Fecha: 2001-05
Publicado en: Journal of Vacuum Science and Technology A, 19 (3), 1024-1026.
Tipo de documento: Artículo
Resumen: N2+ bombardment of Al2O3 has been investigated by near edge x-ray absorption fine structure spectroscopy. Two kinds of species were detected and were attributed to implanted nitrogen atoms and nitride species. These results are discussed in relation to previous attributions in the literature of these species to AlNO and AlN.
Cita: Barranco Quero, Á., Holgado Vázquez, J.P., Yubero Valencia, F., Espinós, J.P., Martín, A.I. y Rodríguez González-Elipe, A. (2001). Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment. Journal of Vacuum Science and Technology A, 19 (3), 1024-1026.
Tamaño: 36.45Kb
Formato: PDF

URI: http://hdl.handle.net/11441/63460

DOI: 10.1116/1.1355762

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