Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment

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Author:	Barranco Quero, Ángel Holgado Vázquez, Juan Pedro Yubero Valencia, Francisco Espinós Manzorro, Juan Pedro Martín, Ana I. Rodríguez González-Elipe, Agustín
Department:	Universidad de Sevilla. Departamento de Química Inorgánica
Date:	2001-05
Published in:	Journal of Vacuum Science and Technology A, 19 (3), 1024-1026.
Document type:	Article
Abstract:	N2+ bombardment of Al2O3 has been investigated by near edge x-ray absorption fine structure spectroscopy. Two kinds of species were detected and were attributed to implanted nitrogen atoms and nitride species. These results are discussed in relation to previous attributions in the literature of these species to AlNO and AlN.
Cite:	Barranco Quero, Á., Holgado Vázquez, J.P., Yubero Valencia, F., Espinós, J.P., Martín, A.I. y Rodríguez González-Elipe, A. (2001). Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment. Journal of Vacuum Science and Technology A, 19 (3), 1024-1026.