Repositorio de producción científica de la Universidad de Sevilla

Optical refractive index and static permittivity of mixed Zr–Si oxide thin films prepared by ion beam induced CVD

 

Advanced Search
 
Opened Access Optical refractive index and static permittivity of mixed Zr–Si oxide thin films prepared by ion beam induced CVD
Cites

Show item statistics
Icon
Export to
Author: Ferrer, F.J.
Frutos Rayego, Fabián
García López, J.
González-Elipe, Agustín R.
Yubero Valencia, Francisco
Department: Universidad de Sevilla. Departamento de Física Aplicada I
Date: 2007
Published in: Thin Solid Films, 516(2-4), 481–485
Document type: Article
Abstract: Mixed oxides ZrxSi1−xO2 (0bxb1) thin films have been prepared at room temperature by decomposition of (CH3CH2O)3SiH and Zr[OC (CH3)3]4 volatile precursors induced by mixtures of O2 + and Ar+ ions. The films were flat and amorphous independently of...
[See more]
Size: 441.8Kb
Format: PDF

URI: http://hdl.handle.net/11441/30905

DOI: http://dx.doi.org/10.1016/j.tsf.2007.07.139

See editor´s version

This work is under a Creative Commons License: 
Atribución-NoComercial-CompartirIgual 4.0 InternacionalAtribución-NoComercial-CompartirIgual 4.0 InternacionalAtribución-NoComercial-CompartirIgual 4.0 Internacional

This item appears in the following Collection(s)