Leñero Bardallo, Juan Antonio2019-08-222019-08-222019-06-26Gaitero Pérez, M. (2019). Study of the impact of lithography techniques and the current fabrication processes on the design rules of tridimensional fabrication technologies. (Trabajo Fin de Máster Inédito). Universidad de Sevilla, Sevilla.https://hdl.handle.net/11441/88560Working for the photolithography tool manufacturer leader sometimes gives me the impression of how complex and specific is the sector I am working on. This master thesis topic came with the goal of getting the overall picture of the state-of-the-art: stepping out and trying to get a helicopter view usually helps to understand where a process is in the productive chain, or what other firms and markets are doing to continue improvingapplication/pdfengAttribution-NonCommercial-NoDerivatives 4.0 Internacionalhttp://creativecommons.org/licenses/by-nc-nd/4.0/Study of the impact of lithography techniques and the current fabrication processes on the design rules of tridimensional fabrication technologiesinfo:eu-repo/semantics/masterThesisinfo:eu-repo/semantics/openAccess