El Beainou, RayaGarcía Valenzuela, AurelioRaschetti, MarinaCote, Jean MarcÁlvarez Molina, RafaelPalmero Acebedo, AlbertoPotin, ValérieMartin, Nicolas2024-06-182024-06-182020-04-01El Beainou, R., García Valenzuela, A., Raschetti, M., Cote, J.M., Álvarez Molina, R., Palmero Acebedo, A.,...,Martin, N. (2020). A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films. Materials Letters, 264, Article number 127381. https://doi.org/10.1016/j.matlet.2020.127381.0167 - 577Xhttps://hdl.handle.net/11441/160599We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone.application/pdf4 p.engAttribution-NonCommercial-NoDerivatives 4.0 Internacionalhttp://creativecommons.org/licenses/by-nc-nd/4.0/Oblique angle depositionW thin filmsTilted columnsDenseFibrous morphologyinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/openAccesshttps://doi.org/10.1016/j.matlet.2020.127381