Gil Rostra, JorgeYubero Valencia, FranciscoFernández, R.Cotrino Bautista, JoséOrtega-Feliú, InésRodríguez González-Elipe, Agustín2019-02-132019-02-132011Gil Rostra, J., Yubero Valencia, F., Fernández, R., Cotrino Bautista, J., Ortega-Feliú, I. y Rodríguez González-Elipe, A. (2011). Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering. Optical Materials Express, 1 (6), 1100-1112. https://doi.org/10.1364/OME.1.001100.2159-3930https://hdl.handle.net/11441/82982Colored semi-transparent Cu-Si oxide thin films have been prepared by reactive magnetron sputtering from a single cathode of copper-silicon composition. Thin films of different composition and optical response were obtained by changing process parameters like the relative amount of copper in the target and the O2/Ar mixture of the reactive plasma gas. The film characteristics were analyzed by several techniques. Their optical properties (refractive index, absorption coefficient, color) have been correlated with the process parameters used in the film preparation as well as with the film stoichiometry and chemistry.application/pdfengAttribution-NonCommercial-NoDerivatives 4.0 Internacionalhttp://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/articleinfo:eu-repo/semantics/openAccesshttps://doi.org/10.1364/OME.1.001100