Ochando, I.M.Cáceres, D.García López, J.Escobar-Galindo, RamónJiménez Rioboó, Rafael JoséPrieto, C.2023-06-292023-06-292007-08-28Ochando, I.M., Cáceres, D., García López, J., Escobar-Galindo, R., Jiménez Rioboó, R.J. y Prieto, C. (2007). Influence of the yttria content on the mechanical properties of Y2O3-ZrO2 thin films prepared by EB-PVD. Vacuum, 81 (11-12), 1457-1461. https://doi.org/10.1016/j.vacuum.2007.04.028.0042-207X (impreso)1879-2715 (online)https://hdl.handle.net/11441/147570A mechanical characterization study of the whole range (ZrO2)1−x–(Y2O3)x system is presented for thin film samples. Films have been prepared by Electron Beam Physical Vapour Deposition (EB-PVD) on Si(1 0 0) substrates. The mechanical characterization, obtained from nanoindentation and Brillouin Light scattering (BLS) techniques, shows a monotonous behaviour between the two pure compounds of the series except for the film with 0.08 Y2O3 molar content of yttria-stabilized zirconia (YSZ) solid solution that presents an anomalous hard value. Additionally, BLS is presented as an alternative technique to the study of the mechanical properties of this system.application/pdf5engAttribution-NonCommercial-NoDerivatives 4.0 Internacionalhttp://creativecommons.org/licenses/by-nc-nd/4.0/EB-PVD preparation of yttria-stabilized zirconia thin filmsMechanical properties yttria zirconia systeminfo:eu-repo/semantics/articleinfo:eu-repo/semantics/openAccesshttps://doi.org/10.1016/j.vacuum.2007.04.028