Presentation
Room temperature deposition of highly dense TiO2 thin films by Filtered Cathodic Vacuum Arc
| Author/s | Guillén Guillén, Elena
Heras, Irene Rincón Llorente, G. Lungwitz, Frank Alcón Camas, M. Escobar-Galindo, Ramón 
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| Department | Universidad de Sevilla. Departamento de Física Aplicada I |
| Publication Date | 2015 |
| Deposit Date | 2023-06-14 |
| Published in |
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| ISBN/ISSN | 9781628417241 0277-786X (impreso) |
| Abstract | A systematic study of TiO2 films deposited by dc filtered cathodic vacuum arc (FCVA) was carried out by varying the deposition parameters in a reactive oxygen atmosphere. The influence of the oxygen partial pressure on ... |
| Funding agencies | European Union (UE). H2020 |
| Project ID. | Friends2
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| Citation | Guillén Guillén, E., Heras, I., Rincón Llorente, G., Lungwitz, F., Alcón Camas, M. y Escobar-Galindo, R. (2015). Room temperature deposition of highly dense TiO2 thin films by Filtered Cathodic Vacuum Arc. En Nanoscience + Engineering California, Estados Unidos: SPIE Digital Library. |
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| 95580S-2-9 (1).pdf | 1.094Mb | 
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https://hdl.handle.net/11441/147202
https://doi.org/10.1117/12.2189503This item appears in the following collection(s)
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