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Artículo
Chemical and structural investigation of the role of both Mn and Mn oxide in the formation of manganese silicate barrier layers on SiO2
(American Institute of Physics, 2011-09)
In this study, Mn silicate (MnSiO3) barrier layers were formed on thermally grown SiO2 using both metallic Mn and oxidized Mn films, in order to investigate the role of oxygen in determining the extent of the interaction ...
Artículo
Chemical and structural investigations of the interactions of Cu with MnSiO3 diffusion barrier layers
(American Institute of Physics, 2012-09)
X-ray photoelectron spectroscopy (XPS) has been used to investigate the thermodynamic stability of Cu layers deposited onto Mn silicate (MnSiO3) barrier layers formed on SiO2 surfaces. Using a fully in situ growth and ...