ListarArtículos (Física Aplicada I) por materia "Defect characterization"
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Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas
(ScienceDirect, 2004-09)Intrinsic stress in amorphous hydrogenated carbon (a-C:H) coatings was reduced through addition of 10–20 sccm N2 to the ...