Artículo
Microstructural characterization and thermal stability of He charged amorphous silicon films prepared by magnetron sputtering in helium
Autor/es | Fernández Camacho, Asunción
Sauvage, Thierry Diallo, Babacar Hufschmidt, Dirk Jiménez de Haro, María del Carmen Montes Amorín, Olga Martínez Blanes, José María Caballero Hernández, Jaime Fortio Godinho, Vanda Cristina Ferrer Fernández, Francisco Javier Ibrahim, Sara Brault, Pascal Thomann, Anne Lise |
Departamento | Universidad de Sevilla. Departamento de Química Inorgánica Universidad de Sevilla. Departamento de Ingeniería y Ciencia de los Materiales y del Transporte Universidad de Sevilla. Departamento de Física Atómica, Molecular y Nuclear |
Fecha de publicación | 2023-06 |
Fecha de depósito | 2023-06-28 |
Resumen | Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si films containing high amounts of gas-filled nanopores. Here we compare the microstructure and composition ... Sputtering of silicon in a Helium magnetron discharge has been reported as a bottom-up procedure to obtain amorphous Si films containing high amounts of gas-filled nanopores. Here we compare the microstructure and composition of Si–He nanocomposite films deposited by magnetron sputtering (MS) with 4He in DC or RF and 3He in RF operation modes. Electron microscopy (SEM and TEM), X-ray diffraction (XRD) and ion beam analysis (IBA) have been used to analyze the films and to investigate the in-situ and ex-situ thermal evolution. Depending on deposition conditions different in depth compositions, nanopore size and shape distributions, porosity and He content could be obtained. The presence of impurities (i.e. oxygen) has shown to promote He diffusivity reducing He accumulation. The start temperature of He-release varied in the range 473–723 K without films crystallization. Films grown in RF mode reached contents of 32 and 29 at% of 4He and 3He and were respectively stable up to 573 and 723 K both in vacuum and under inert gas flow. In-situ p-EBS (proton Elastic Back Scattering) allowed monitoring the He release accompanied by blistering/delamination effects visualized by SEM. These results show the potentiality of annealing to hold nano-porous structures after liberation of trapped gas. |
Agencias financiadoras | Junta de Andalucía (Spain) and EU FEDER grant RTI2018-093871-BI00 Junta de Andalucía (Spain) and EU FEDER grant P20-00239 Junta de Andalucía (Spain) and EU FEDER grant PID2021-124439NB-I00 CSIC grant 202160E029 |
Identificador del proyecto | RTI2018-093871-BI00
P20-00239 PID2021-124439NB-I00 CSIC 202160E029 |
Ficheros | Tamaño | Formato | Ver | Descripción |
---|---|---|---|---|
MCP_fortio-godinho_2023_micros ... | 14.43Mb | [PDF] | Ver/ | |